CMOS compatible embedded microchannels

Conference paper (2017)

Authors

R. Stoute Electronic Components, Technology and Materials -

J.M. Muganda External organisation

S. Dahar External organisation

A. Arslan Electronic Components, Technology and Materials -

R.J.M Henderikx Eindhoven University of Technology

P.C.M. van Stiphout Bionchip

JMJ den Toonder Eindhoven University of Technology

R. Dekker Electronic Components, Technology and Materials -

Research Group

Electronic Components, Technology and Materials () (TU Delft)

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Published Date

2017

Language

English

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Components, Technology and Materials

Abstract

Microfluidics has been identified as a revolutionizing technology for chemistry and biology, enabling cost-effective semi-automated experiments without extensive laboratory infrastructure. However, the complexity and number of simultaneous experiments is limited with current fabrication approaches. We present a novel CMOS compatible process to fabricate embedded microchannels that can greatly enhance the functionality and scalability of microfluidic experimentation. The feasibility of the fabrication process is demonstrated with a device to probe mechanical properties of cells before and after presenting them a stimulus.