CMOS compatible embedded microchannels
Ronald Stoute (TU Delft - Electronic Components, Technology and Materials)
J.M. Muganda (External organisation)
S. Dahar (External organisation)
A. Arslan (TU Delft - Electronic Components, Technology and Materials)
R.J.M Henderikx (Eindhoven University of Technology)
P.C.M. van Stiphout (Bionchip)
JMJ den Toonder (Eindhoven University of Technology)
R. Dekker (TU Delft - Electronic Components, Technology and Materials)
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Abstract
Microfluidics has been identified as a revolutionizing technology for chemistry and biology, enabling cost-effective semi-automated experiments without extensive laboratory infrastructure. However, the complexity and number of simultaneous experiments is limited with current fabrication approaches. We present a novel CMOS compatible process to fabricate embedded microchannels that can greatly enhance the functionality and scalability of microfluidic experimentation. The feasibility of the fabrication process is demonstrated with a device to probe mechanical properties of cells before and after presenting them a stimulus.
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