Inductively coupled plasma etching of deep photonic crystal holes in InP using Cl-2

CF Carlstrom (External organisation)

R van der Heijden (External organisation)

AAM Kok (External organisation)

RW van der Heijden (External organisation)

F Karouta (External organisation)

JJGM van der Tol (External organisation)

R Nötzel (External organisation)

PJ van Veldhoven (External organisation)

Huub Salemink (TU Delft - QN/Afdelingsbureau)