Inductively coupled plasma etching of deep photonic crystal holes in InP using Cl-2

Conference paper (2005)

Authors

CF Carlstrom External organisation
R van der Heijden External organisation
AAM Kok External organisation
RW van der Heijden External organisation
F Karouta External organisation
JJGM van der Tol External organisation
R Nötzel External organisation
PJ van Veldhoven External organisation
H.W.M. Salemink QN/Afdelingsbureau
Research Group
QN/Afdelingsbureau
More Info
expand_more

Published Date

2005

Language

Undefined/Unknown

Reuse Rights

Other than for strictly personal use, it is not permitted to download, forward or distribute the text or part of it, without the consent of the author(s) and/or copyright holder(s), unless the work is under an open content license such as Creative Commons.

Research Group

QN/Afdelingsbureau