An experimental setup to proof the MAPPER electron lithography concept.
Conference Paper
(1999)
Author(s)
BJ Kampherbeek (TU Delft - ImPhys/Charged Particle Optics)
MJJ Wieland (TU Delft - ImPhys/Charged Particle Optics)
P Kruit (TU Delft - ImPhys/Charged Particle Optics)
Research Group
ImPhys/Charged Particle Optics
To reference this document use:
https://resolver.tudelft.nl/uuid:fab34ec6-ca7a-4470-905a-bfd113dbdce4
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Publication Year
1999
Research Group
ImPhys/Charged Particle Optics
Pages (from-to)
239-240
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