High-performance humidity sensor using Schottky-contacted SnS nanoflakes for noncontact healthcare monitoring

Journal article (2020)

Authors

H. Tang Electronic Components, Technology and Materials - , Tsinghua University, Changzhou Institute of Technology Research for Solid State Lighting

Yutao Li Tsinghua University

Tianling Ren Tsinghua University

Kouchi Zhang Electronic Components, Technology and Materials -

H. Ye Shenzhen Institute of Wide-bandgap Semiconductors, Southern University of Science and Technology, Chongqing University

Fafei Hu Chongqing University

Chenshan Gao Chongqing University

Luqi Tao Chongqing University

Tao Tu Tsinghua University

Guangyang Gou Tsinghua University

Xianping Chen Chongqing University

X. Fan Lamar University

Research Group

Electronic Components, Technology and Materials () (TU Delft)

Humidity sensor Healthcare monitoring Noncontact sensation Schottky-contact SnS nanoflakes

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Published Date

2020

Language

English

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Components, Technology and Materials

Abstract

Humidity sensors based on flexible sensitive nanomaterials are very attractive in noncontact healthcare monitoring. However, the existing humidity sensors have some shortcomings such as limited sensitivity, narrow relative humidity (RH) range, and a complex process. Herein, we show that a tin sulphide (SnS) nanoflakes-based sensor presents high humidity sensing behaviour both in rigid and flexible substrate. The sensing mechanism based on the Schottky nature of a SnS-metal contact endows the as-fabricated sensor with a high response of 2491000% towards a wide RH range from 3% RH to 99% RH. The response and recovery time of the sensor are 6 s and 4 s, respectively. Besides, the flexible SnS nanoflakes-based humidity sensor with a polyimide substrate can be well attached to the skin and exhibits stable humidity sensing performance in the natural flat state and under bending loading. Moreover, the first-principles analysis is performed to prove the high specificity of SnS to the moisture (H2O) in the air. Benefiting from its promising advantages, we explore some application of the SnS nanoflakes-based sensors in detection of breathing patterns and non-contact finger tips sensing behaviour. The sensor can monitor the respiration pattern of a human being accurately, and recognize the movement of the fingertip speedily. This novel humidity sensor shows great promising application in physiological and physical monitoring, portable diagnosis system, and noncontact interface localization.

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