Metal patterning on high topography surface for 3D RF devices fabrication

Conference paper (2003)

Authors

PN Pham Electronic Components, Technology and Materials - EEMCS
E Boellaard Electronic Components, Technology and Materials - EEMCS
W.H.A. Wien Electronic Components, Technology and Materials - EEMCS
LDM van den Brekel External organisation
JN Burghartz Old - EWI Ch. Integrated Sensing Devices
Pasqualina M Sarro Electronic Components, Technology and Materials - EEMCS
Research Group
Electronic Components, Technology and Materials (EEMCS) (TU Delft)
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Published Date

2003

Language

Undefined/Unknown

Reuse Rights

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Components, Technology and Materials