Metal patterning on high topography surface for 3D RF devices fabrication
Conference Paper
(2003)
Author(s)
PN Pham (TU Delft - Electronic Components, Technology and Materials)
E Boellaard (TU Delft - Electronic Components, Technology and Materials)
W.H.A. Wien (TU Delft - Electronic Components, Technology and Materials)
LDM van den Brekel (External organisation)
JN Burghartz (TU Delft - Old - EWI Ch. Integrated Sensing Devices)
Pasqualina M Sarro (TU Delft - Electronic Components, Technology and Materials)
Research Group
Electronic Components, Technology and Materials
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https://resolver.tudelft.nl/uuid:faed1d8e-a5e5-4934-8811-abefe6909f88
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Publication Year
2003
Research Group
Electronic Components, Technology and Materials
Pages (from-to)
440-443
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