Excimer-laser lateral crystallization scenario of silicon thin films by phase-field modelling

Conference Paper (2001)
Author(s)

A Burtsev (External organisation)

M Apel (External organisation)

R. Ishihara (TU Delft - Electronic Components, Technology and Materials)

Research Group
Electronic Components, Technology and Materials
More Info
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Publication Year
2001
Research Group
Electronic Components, Technology and Materials
Pages (from-to)
8-12
ISBN (print)
90-76461-29-4

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