Modeling of blanket and selective tungsten LPCVD
Conference Paper
(1996)
Author(s)
KJ Kuijlaars (TU Delft - Old - sect Kramers Laboratory (MSP/FT))
C.R. Kleijn (TU Delft - Old - sect Kramers Laboratory (MSP/FT))
Harry Van den Akker (TU Delft - Old - sect Kramers Laboratory (MSP/FT))
TGM Oosterlaken (External organisation)
Guido Janssen (TU Delft - OLD Metals Processing, Microstructures and Properties)
Research Group
Old - sect Kramers Laboratory (MSP/FT)
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Publication Year
1996
Research Group
Old - sect Kramers Laboratory (MSP/FT)
Pages (from-to)
353-340
ISBN (print)
1-55899-341-X
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