Modeling of blanket and selective tungsten LPCVD

Conference paper (1996)

Authors

KJ Kuijlaars Old - sect Kramers Laboratory (MSP/FT)
C.R. Kleijn Old - sect Kramers Laboratory (MSP/FT)
H.E.A. van den Akker Old - sect Kramers Laboratory (MSP/FT)
TGM Oosterlaken External organisation
G.C.A.M. Janssen OLD Metals Processing, Microstructures and Properties
Research Group
Old - sect Kramers Laboratory (MSP/FT)
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Published Date

1996

Language

Undefined/Unknown

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Research Group

Old - sect Kramers Laboratory (MSP/FT)