High depth resolution SIMS analysis with low-energy grazing O2+ beams
Journal Article
(1997)
Author(s)
ZX Jiang (External organisation)
E Algra (External organisation)
Paul Alkemade (TU Delft - Old - sect Electronic Materials (NS/EM))
S Radelaar (TU Delft - OLD Metals Processing, Microstructures and Properties)
Research Group
Old - sect Electronic Materials (NS/EM)
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https://resolver.tudelft.nl/uuid:fed4760e-95e0-445d-90d7-ccb9ce71686a
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Publication Year
1997
Research Group
Old - sect Electronic Materials (NS/EM)
Volume number
25
Pages (from-to)
285-291
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