document

Integrated MEMS: Opportunities & Challenges

French, P.J. (author), Sarro, P.M. (author)

book chapter 2012

document

Surface functionalisation of TiO2 evanescent waveguide sensor for E.coli monitoring

Purniawan, A. (author), Pandraud, G. (author), Vakalopoulos, K.A. (author), French, P.J. (author), Sarro, P.M. (author)

conference paper 2012

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Polarization-insensitive PECVD SiC waveguides for photonic sensing

Pandraud, G. (author), Pham, H.T.M. (author), Pakula, L.S. (author), Sarro, P.M. (author), French, P.J. (author)

Planar silicon carbide (SiC) waveguides are proposed for fabrication on a silicon substrate with a oxide isolation layer. Using post deposition annealing it is possible to achieve low Polarization-Dependent Loss (PDL) within optical SiC waveguides fabricated using a low temperature deposition technique. Those waveguides have been successfully...

conference paper 2005

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Simple optical characterisation for biomimetic micromachined silicon strain-sensing structure

Wicaksono, D.H.B. (author), Pandraud, G. (author), French, P.J. (author)

This paper presents an on-going work to develop micromachined silicon-based strain sensor inspired from the campaniform sensillum of insects. We present simple optical setup for the characterisation of a membrane-in-recess structure as an early stage in mimicking the natural sensor. The microstructure is a 500 nm-thick SiO2/SiN circular membrane...

conference paper 2005

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DRIE and Bonding Assisted Low Cost MEMS Processing of In-plane HAR Inertial Sensors

Rajaraman, V. (author), Makinwa, K.A.A. (author), French, P.J. (author)

We present a simple, flexible and low cost MEMS fabrication process, developed using deep reactive ion etching (DRIE) and wafer bonding technologies, for manufacturing in-plane high aspect ratio (HAR) inertial sensors. Among examples, the design and fabrication results of a two axis inertial device are presented. Fabricated device thickness...

conference paper 2008

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Electrochemical study of potential materials for cochlear implant electrode array (abstract)

Lawand, N.S. (author), Lopez, V. (author), French, P.J. (author)

Cochlear implants (CIs) are commonly accepted therapeutic devices for clinical use and have restored hearing to more than 230,000 profoundly deaf people. CI devices consists of an external part comprising a speech processor (DSP) a microphone which together receive and convert the sound into a digital data stream using a speech processing...

conference paper 2013

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A Pull-in Operation Mode Accelerometer

Pakula, L. (author), French, P. (author)

conference paper 2007

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Robust Wafer-Level Thin-Film Encapsulation (Packaging) of Microstructures (MEMS) using Low Stress PECVD Silicon Carbide

Rajaraman, V. (author), Pakula, L.S. (author), Pham, H.T.M. (author), Sarro, P.M. (author), French, P.J. (author)

This paper presents a new low-cost, CMOS-compatible and robust wafer-level encapsulation technique developed using a stress-optimised PECVD SiC as the capping and sealing material, imparting harsh environment capability. This technique has been applied for the fabrication and encapsulation of a wide variety of surface- and thin-SOI...

conference paper 2009

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Thermo-optical delay line for optical coherence tomography

Margallo-Balbas, E. (author), Pandraud, G. (author), French, P.J. (author)

Optical Coherence Tomography (OCT) is a powerful medical imaging technology. Its ability to non-invasively probe tissues in depth with high resolution has lead to applications in many fields of medicine, with a large potential for surgical guidance. One of the technological challenges impairing faster adoption of OCT is the relative complexity...

conference paper 2007

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SOI Digital Accelerometer Based on Pull-in Time Configuration

Pakula, L.S. (author), Rajaraman, V. (author), French, P.J. (author)

The operation principle, design, fabrication and measurement results of a quasi digital accelerometer fabricated on a thin silicon-on-insulator (SOI) substrate is presented. The accelerometer features quasi-digital output, therefore eliminating the need for analogue signal conditioning. The accelerometer can be directly interfaced to digital...

conference paper 2009

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Miniature 10 kHz thermo-optic delay line in silicon

Margallo-Balbás, E. (author), Geljon, M. (author), Pandraud, G. (author), French, P.J. (author)

The scanning delay line is a key component of time-domain optical coherence tomography systems. It has evolved since its inception toward higher scan rates and simpler implementation. However, existing approaches still suffer from drawbacks in terms of size, cost, and complexity, and they are not suitable for implementation using integrated...

journal article 2010

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Atomic layer deposition of TiO2 photonic crystal waveguide biosensors

Jardinier, E. (author), Pandraud, G. (author), Pham, M.H. (author), French, P.J. (author), Sarro, P.M. (author)

A photonic crystal waveguide biosensor in the visible is presented for biosensing. The sensor is applied to Refractive Index (RI) measurements. The sensitivity at different wavelength is presented for both air holes and air core configurations of photonic crystal waveguide (PCW) made of TiO2. It is shown that by using Atomic Layer Deposition ...

journal article 2009

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The impact of morphology on light transport in cancellous bone

Margallo-Balbás, E. (author), Taroni, P. (author), Pifferi, A. (author), Koolstra, J.H. (author), Van Ruijven, L.J. (author), French, P.J. (author)

In recent years, optical techniques based on diffusion approximation have demonstrated their ability to gain rich spectral information about bone. However, these methods normally assume homogeneity, while cancellous bone and marrow form a highly heterogeneous two-phase medium. This paper studies the limitations of this assumption, and quantifies...

journal article 2010

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Fly's proprioception-inspired micromachined strain-sensing structure: Idea, design, modeling and simulation, and comparison with experimental results

Wicaksono, D.H.B. (author), Zhang, L.J. (author), Pandraud, G. (author), French, P.J. (author), Vincent, J.F.V. (author)

journal article 2006

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Biomimetics: Learning From Nature To Make Better Sensors

French, P.J. (author), Wicaksono, D.H.B. (author)

Nature has been the inspiration in art for centuries. In the 19th Century there were a number of attempts to copy nature and apply the ideas to engineering. Unfortunately, this was often done without understanding the details of operation of the natural systems. In some cases engineering successes were based on natural systems without the...

journal article 2009

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PECVD silicon carbide surface micromachining technology and selected MEMS applications

Rajaraman, V. (author), Pakula, L.S. (author), Yang, H. (author), French, P.J. (author), Sarro, P.M. (author)

Attractive material properties of plasma enhanced chemical vapour deposited (PECVD) silicon carbide (SiC) when combined with CMOS-compatible low thermal budget processing provides an ideal technology platform for developing various microelectromechanical systems (MEMS) devices and merging them with integrated circuits. In this paper we present a...

journal article 2011

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Actuated elastomers with rigid vertical electrodes

Lau, G.K. (author), Goosen, J.F.L. (author), Van Keulen, F. (author), French, P.J. (author), Sarro, P.M. (author)

journal article 2006

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Biomimetic strain-sensing microstructure for improved strain sensor: Fabrication results and optical characterization

Wicaksono, D.H.B. (author), Vincent, J.F.V. (author), Pandraud, G. (author), Craciun, G. (author), French, P.J. (author)

journal article 2005

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Shape based Monte Carlo code for light transport in complex heterogeneous tissues

Margallo-Balbás, E. (author), French, P.J. (author)

A Monte Carlo code for the calculation of light transport in heterogeneous scattering media is presented together with its validation. Triangle meshes are used to define the interfaces between different materials, in contrast with techniques based on individual volume elements. This approach allows to address realistic problems in a flexible way...

journal article 2007

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Design, Modelling and Fabrication of a 40-330 Hz Dual-Mass MEMS Gyroscope on Thick-SOI Technology

Rajaraman, V. (author), Sabageh, I. (author), French, P. (author), Pansraud, G. (author), Cretu, E. (author)

This work reports the design, modelling, fabrication and preliminary functionality testing of a dual-mass MEMS vibratory gyroscope for application in medical instrumentation, among others. The two-framed gyro has drive and sense mode resonance frequencies of 2500Hz and 2830Hz, with its bandwidth tunable between 40-330Hz. Adopted design and...

journal article 2011