Print Email Facebook Twitter Investigation of morphological changes in platinum-containing nanostructures created by electron-beam-induced deposition Title Investigation of morphological changes in platinum-containing nanostructures created by electron-beam-induced deposition Author Botman, A. Hesselberth, M. Mulders, J.J.L. Faculty Applied Sciences Department IST/Imaging Science and Technology Date 2008-12-01 Abstract Focused electron-beam-induced deposition (EBID) allows the rapid fabrication of three-dimensional nanodevices and metallic wiring of nanostructures, and is a promising technique for many applications in nanoresearch. The authors present two topics on platinum-containing nanostructures created by EBID. First, they report on a TEM study of the microstructure of nanodeposits created from Pt(PF3)4. They have performed imaging and electron energy loss spectroscopy with a transmission electron microscope (TEM). The deposited material, composed mainly of platinum, phosphor, oxygen, and trace amounts of fluorine, is amorphous. Platinum is evenly distributed in the nanostructure, while phosphorus is observed to cluster. The size and amount of phosphorus clusters depend on the thickness of the structure. Second, they document an aging process in structures created from MeCpPtMe3, which have a resistivity which increases with the time they are exposed to air, from 2×105 to 1.8×108????cm over 55?days. They demonstrate that covering the structures with an EBID-deposited insulating protective layer of TEOS can prevent this oxidation. In doing so, they achieved the lowest reported resistivity for EBID from this platinum precursor, of 1.5×103????cm. Subject ageingelectrical resistivityelectron beam depositionelectron energy loss spectrananostructured materialsnanotechnologyoxidationplatinum compoundsprotective coatingstransmission electron microscopymethycyclopentadienyl platinum trimethyltetrakis trifluorophosphine platinumtetraethylorthosilicate To reference this document use: http://resolver.tudelft.nl/uuid:510927a6-b546-4639-92ce-2a64e7e4908c Publisher American Vacuum Society ISSN 1071-1023 Source https://doi.org/10.1116/1.2990790 Source Journal of Vacuum Science & Technology B, 26 (6), 2008 Part of collection Institutional Repository Document type journal article Rights © 2008 American Vacuum Society Files PDF Botman_2008.pdf 549.74 KB Close viewer /islandora/object/uuid%3A510927a6-b546-4639-92ce-2a64e7e4908c/datastream/OBJ/view