Interferometric coherent Fourier scatterometry: a method for obtaining high sensitivity in the optical inverse-grating problem

Title

Interferometric coherent Fourier scatterometry: a method for obtaining high sensitivity in the optical inverse-grating problem

 Author

Roy, S. (TU Delft ImPhys/Optics)
Kumar, N. (TU Delft ImPhys/Optics)
Pereira, S.F. (TU Delft ImPhys/Optics)
Urbach, Paul (TU Delft ImPhys/Optics)

Date

2013

 Subject

CWTS 0.75 <= JFIS < 2.00

 To reference this document use:

http://resolver.tudelft.nl/uuid:0218bf7f-6bce-46a3-beb2-818a4249693c

 DOI

https://doi.org/10.1088/2040-8978/15/7/075707

 Embargo date

2013-12-04

 ISSN

1464-4258

 Source

Journal of Optics, 15 (7), 1-9

 Bibliographical note

Green Open Access added to TU Delft Institutional Repository 'You share, we take care!' - Taverne project https://www.openaccess.nl/en/you-share-we-take-care Otherwise as indicated in the copyright section: the publisher is the copyright holder of this work and the author uses the Dutch legislation to make this work public. 075707-1 t/m 075707-9

 Part of collection

Institutional Repository

 Document type

journal article

 Rights

© 2013 S. Roy, N. Kumar, S.F. Pereira, Paul Urbach
Files
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