Nanoelectromechanical sensors based on suspended 2D materials

Review (2020)

Authors

Max C. Lemme AMICA, Rheinisch-Westfälische Technische Hochschule
Georg S. Duesberg University of the Federal Armed Forces Munich
Peter G. Steeneken Dynamics of Micro and Nano Systems - Mechanical, Maritime and Materials Engineering , QN/Steeneken Lab - AS , Kavli institute of nanoscience Delft
P.G. Steeneken Dynamics of Micro and Nano Systems - Mechanical, Maritime and Materials Engineering , QN/Steeneken Lab - AS , Kavli institute of nanoscience Delft
Kangho Lee University of the Federal Armed Forces Munich
Xuge Fan KTH Royal Institute of Technology
G.J. Verbiest Dynamics of Micro and Nano Systems - Mechanical, Maritime and Materials Engineering
Sebastian Wittmann Infineon Technologies AG
Sebastian Lukas Rheinisch-Westfälische Technische Hochschule
R.J. Dolleman Rheinisch-Westfälische Technische Hochschule
Frank Niklaus KTH Royal Institute of Technology
H.S.J. van der Zant Kavli institute of nanoscience Delft, QN/van der Zant Lab - AS
Research Group
Dynamics of Micro and Nano Systems (Mechanical, Maritime and Materials Engineering) (TU Delft)
Copyright: © 2020 Max C. Lemme, Stefan Wagner, Kangho Lee, Xuge Fan, G.J. Verbiest, Sebastian Wittmann, Sebastian Lukas, R.J. Dolleman, Frank Niklaus, H.S.J. van der Zant, Georg S. Duesberg, P.G. Steeneken
DOI: https://doi.org/10.34133/2020/8748602
More Info
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Published Date

2020

Language

English

Faculty

Mechanical, Maritime and Materials Engineering

Department

Precision and Microsystems Engineering

Research Group

Dynamics of Micro and Nano Systems

Abstract

The unique properties and atomic thickness of two-dimensional (2D) materials enable smaller and better nanoelectromechanical sensors with novel functionalities. During the last decade, many studies have successfully shown the feasibility of using suspended membranes of 2D materials in pressure sensors, microphones, accelerometers, and mass and gas sensors. In this review, we explain the different sensing concepts and give an overview of the relevant material properties, fabrication routes, and device operation principles. Finally, we discuss sensor readout and integration methods and provide comparisons against the state of the art to show both the challenges and promises of 2D material-based nanoelectromechanical sensing.