Implementation of Fully Coupled Electromigration Theory in COMSOL

Implementation of Fully Coupled Electromigration Theory in COMSOL

Cui, Z. (TU Delft Electronic Components, Technology and Materials)
Fan, X. (TU Delft Electronic Components, Technology and Materials; Lamar University)
Zhang, Kouchi (TU Delft Electronic Components, Technology and Materials)

O'Conner, L. (editor)

2022

In this paper, a 3D and fully coupled electromigration modeling is implemented using COMSOL. The fully coupled multi-physics theory has a unique set of partial differential equations, which cannot be directly simulated with the standard finite element software such as ABAQUS and ANSYS. With the weak form PDE modulus in COMSOL, the weak form of the governing equations is obtained and realized for a 3D finite element modeling of electromigration. The metal lines under totally constrained and stress-free conditions with a perfectly blocking condition are presented as benchmark problems, in which the finite element solutions are in excellent agreement with the analytical solutions.

Keywords-electromigration
general coupling theory
multiphysics modeling
finite element analysis

http://resolver.tudelft.nl/uuid:281edd71-6f3a-4662-a287-404201b6054c

https://doi.org/10.1109/ECTC51906.2022.00046

IEEE, Piscataway

2023-07-01

978-1-6654-7944-8

Proceedings of the 2022 IEEE 72nd Electronic Components and Technology Conference (ECTC)

2022 IEEE 72nd Electronic Components and Technology Conference (ECTC), 2022-05-31 → 2022-06-03, San Diego, United States

Green Open Access added to TU Delft Institutional Repository 'You share, we take care!' - Taverne project https://www.openaccess.nl/en/you-share-we-take-care Otherwise as indicated in the copyright section: the publisher is the copyright holder of this work and the author uses the Dutch legislation to make this work public.

Institutional Repository

conference paper

© 2022 Z. Cui, X. Fan, Kouchi Zhang