Print Email Facebook Twitter A Kinetic Model for Chemical-Vapor Deposition of Pure-Boron Layers from Diborane (abstract) Title A Kinetic Model for Chemical-Vapor Deposition of Pure-Boron Layers from Diborane (abstract) Author Mohammadi, V. De Boer, W.B. Scholtes, T.L.M. Nanver, L.K. Faculty Electrical Engineering, Mathematics and Computer Science Department Microelectronics Date 2012-05-06 To reference this document use: http://resolver.tudelft.nl/uuid:2f4acc76-cb4d-4191-9e03-54c6abe8f9c3 Publisher The Electrochemical Society ISSN 1091-8213 Source Meeting Abstracts - Electrochemical Society, 221th ECS Meeting, Seattle, USA, 6-10 May 2012: Thermal and Plasma CVD of Nanostructures and Their Applications Part of collection Institutional Repository Document type conference paper Rights © 2012 The Author(s)The Electrochemical Society Files PDF Mohammadi.pdf 65.61 KB Close viewer /islandora/object/uuid:2f4acc76-cb4d-4191-9e03-54c6abe8f9c3/datastream/OBJ/view