Print Email Facebook Twitter Pattern transfer into silicon using sub-10 nm masks made by electron beam-induced deposition Title Pattern transfer into silicon using sub-10 nm masks made by electron beam-induced deposition Author Scotuzzi, M. Kamerbeek, M.J. Goodyear, A. Cooke, M. Hagen, C.W. Faculty Applied Sciences Department Imaging Physics Date 2015-07-15 Abstract To demonstrate the possibility of using electron beam-induced deposition (EBID) masks for sub-10 nm pattern transfer into silicon, first experiments were carried out by using 20- to 40-nm EBID masks, which were etched by different chemistries. It is experimentally verified that recipes based on hydrogen bromide, chlorine, and boron trichloride can selectively etch silicon when using 20- to 40-nm masks made by EBID. We observed an enhancement of the height ratio, i.e., the ratio of the height of structures before and after etching, up to a factor of 3.5 when using chlorine chemistry. To demonstrate the pattern transfer of sub-10 nm structures, further experiments were carried out using 8- to 20-nm EBID masks in combination with hydrogen bromide, chlorine, and fluorine chemistries. Fluorine chemistry provided the best results in terms of surface smoothness and height ratio. In this case, 7.4-nm lines were successfully transferred into silicon, resulting in 14.3-nm-wide lines with a height ratio of ~5. Subject electron beam-induced depositionnano pattern transfernanofabricationreactive ion etchinginductively coupled plasmanano imprint lithographynano imprint lithography stamps To reference this document use: http://resolver.tudelft.nl/uuid:32f1887d-2ae1-422d-9591-3dc7f8efaeb9 DOI doi: 10.1117/1.JMM.14.3.031206 Publisher SPIE ISSN 1932-5150 Source Journal of Micro/Nanolithography, MEMS, and MOEMS, 14(3)2015 Part of collection Institutional Repository Document type journal article Rights (c)2015 SPIE and The authors Files PDF JM3_14_3_031206.pdf 2.31 MB Close viewer /islandora/object/uuid:32f1887d-2ae1-422d-9591-3dc7f8efaeb9/datastream/OBJ/view