Electron microscope and method of estimating defocus therefor

Title

Electron microscope and method of estimating defocus therefor

Author

Tejada Ruiz, A.
Den Dekker, A.J.

Faculty

Mechanical, Maritime and Materials Engineering

Department

Precision and Microsystems Engineering

Date

2012-08-28

To reference this document use:

http://resolver.tudelft.nl/uuid:3e0f8e5f-dccf-4fad-bea1-5f45b00e46ae

Publisher

European Patent Office

Source

http://worldwide.espacenet.com/publicationDetails/biblio?CC=NL&NR=2006300C&KC=C&FT=D&ND=3&date=20120828&DB=EPODOC&locale=en_EP

Source

NL 2006300 (C)

Part of collection

Institutional Repository

Document type

patent

Rights

(c) 2012 The Author(s)