Print Email Facebook Twitter Method of manufacturing a micro unit and a micro unit for use in a microscope Title Method of manufacturing a micro unit and a micro unit for use in a microscope Author Creemer, J.F. Pandraud, G. Santagata, F. Faculty Electrical Engineering, Mathematics and Computer Science Department Microelectronics Date 2011-02-17 Abstract The invention relates to a method of manufacturing a micro unit for use in a microscope. The method comprises the step of providing a planar substrate supporting structure and creating a chamber in the supporting structure for receiving a fluid containing a chemically reacting substance to be inspected. Further, the method comprises the step of coating an inner surface of the chamber with a thin layer. The method also comprises the step of locally removing material from the exterior of the supporting structure until the thin layer is reached for forming a window segment that is at least partially transparent to a beam of radiation generated by the microscope. To reference this document use: http://resolver.tudelft.nl/uuid:45a36221-0bfb-4994-bcd0-a84e1ce1f40b Publisher European Patent Office Source http://worldwide.espacenet.com/publicationDetails/biblio?CC=WO&NR=2011019276A1&KC=A1&FT=D&date=20110217&DB=EPODOC&locale=en_EP Source WO 2011019276 (A1) Part of collection Institutional Repository Document type patent Rights (c) 2011 The Author(s) Files PDF WO2011019276A1.pdf 737.96 KB Close viewer /islandora/object/uuid:45a36221-0bfb-4994-bcd0-a84e1ce1f40b/datastream/OBJ/view