Title
Lossless Matching Layer for Silicon Lens Arrays At 500 GHz Using Laser Ablated Structures
Author
Bueno Lopez, J. (TU Delft Electronics)
Bosma, S. (TU Delft Tera-Hertz Sensing) 
Bußkamp-Alda, Tobias (Veld Laser Innovations B.V.)
Alonso Del Pino, M. (TU Delft Tera-Hertz Sensing)
Llombart, Nuria (TU Delft Tera-Hertz Sensing) 
Date
2022
Abstract
We present the design, fabrication and characterization of a broadband lossless matching layer for silicon lens arrays. The proposed matching layer is based on silicon frusta (truncated pyramids) on top of the lens array fabricated by means of laser ablation. This matching layer is advantageous over quarter-wavelength dielectric matching layers since it covers more than an octave of bandwidth. We compare the performance of this matching layer with the commonly-used parylene-C matching layer at the center of the targetted band (500 GHz) in a lens-antenna integrated system. We measure a 1.6 dB higher transmission of the proposed silicon frusta matching compared to the parylene-C matching layer.
Subject
Anti-reflection coating
dielectric lens antennas
matching layer
submillimeter-wave
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http://resolver.tudelft.nl/uuid:4cdd4f33-d1a8-455e-aeca-a5e5245ce98b
DOI
https://doi.org/10.1109/TTHZ.2022.3202031
Embargo date
2023-07-01
ISSN
2156-342X
Source
IEEE Transactions on Terahertz Science and Technology, 12 (6), 667 - 672
Bibliographical note
Green Open Access added to TU Delft Institutional Repository ‘You share, we take care!’ – Taverne project https://www.openaccess.nl/en/you-share-we-take-care Otherwise as indicated in the copyright section: the publisher is the copyright holder of this work and the author uses the Dutch legislation to make this work public.
Part of collection
Institutional Repository
Document type
journal article
Rights
© 2022 J. Bueno Lopez, S. Bosma, Tobias Bußkamp-Alda, M. Alonso Del Pino, Nuria Llombart