Plasma Etching for Integrated Silicon Sensor Applications

Title

Plasma Etching for Integrated Silicon Sensor Applications

Author

Li, Y.X.

Contributor

Middelhoek, S. (promotor)

Faculty

Electrical Engineering, Mathematics and Computer Science

Date

1995-10-16

Subject

Plasma etching
silicon sensor
micromachining

To reference this document use:

http://resolver.tudelft.nl/uuid:5030552c-3bbe-4659-b4b4-aac93b7bb8b0

Publisher

Delft University Press

ISBN

90-407-1177-1

Part of collection

Institutional Repository

Document type

doctoral thesis

Rights

(c) 1995 Y.X. Li