Print Email Facebook Twitter Performance analysis of coherent optical scatterometry Title Performance analysis of coherent optical scatterometry Author El Gawhary, O. Kumar, N. Pereira, S.F. Coene, W.M.J. Urbach, H.P. Faculty Applied Sciences Department Imaging Science and Technology Date 2011-11-12 Abstract Scatterometry is a well established technique currently utilized in research, as well as in industrial applications, to retrieve the properties of a given scatterer (the target) by looking at how the light coming from a certain source is diffracted in the far field. Currently the light source is often a discharge lamp that, after wavelength filtering, can be thought as a quasi-monochromatic, but spatially incoherent, source. In the present work, benefits of using a focused spot from a spatially coherent light source, as that emitted by a laser, are investigated on a theoretical viewpoint. The focused spot is scanned over the object of interest and, for each scan position, a far-field diffraction pattern is recorded. Our results show that spatially coherent light can sensibly increase the accuracy of the technique with respect to the target’s geometrical profile. To reference this document use: http://resolver.tudelft.nl/uuid:59906872-787c-4a60-a4b7-ed63c1e21f65 DOI https://doi.org/10.1007/s00340-011-4794-7 Publisher Springer ISSN 0946-2171 Source http://www.springerlink.com/content/l33492876272236l/ Source Applied Physics B: Lasers and Optics, 105 (4), 2011 Part of collection Institutional Repository Document type journal article Rights (c) 2011 The Author(s). This article is published with open access at Springerlink.com Files PDF el_Gawhary.pdf 449.88 KB Close viewer /islandora/object/uuid:59906872-787c-4a60-a4b7-ed63c1e21f65/datastream/OBJ/view