Model improvements to simulate charging in SEM

Model improvements to simulate charging in SEM

Arat, K.T. (TU Delft ImPhys/Charged Particle Optics)
Klimpel, T. (GenISys GmbH)
Hagen, C.W. (TU Delft ImPhys/Charged Particle Optics)

Ukraintsev, V.A. (editor)
Adan, O. (editor)

2018-01-01

Charging of insulators is a complex phenomenon to simulate since the accuracy of the simulations is very sensitive to the interaction of electrons with matter and electric fields. In this study, we report model improvements for a previously developed Monte-Carlo simulator to more accurately simulate samples that charge. The improvements include both modelling of low energy electron scattering and charging of insulators. The new first-principle scattering models provide a more realistic charge distribution cloud in the material, and a better match between non-charging simulations and experimental results. Improvements on charging models mainly focus on redistribution of the charge carriers in the material with an induced conductivity (EBIC) and a breakdown model, leading to a smoother distribution of the charges. Combined with a more accurate tracing of low energy electrons in the electric field, we managed to reproduce the dynamically changing charging contrast due to an induced positive surface potential.

Breakdown
Charging
EBIC
Low Energy Electrons
Monte-Carlo simulation
SEM

http://resolver.tudelft.nl/uuid:6ba4e997-7c49-40db-a970-5849dcfe01f2

https://doi.org/10.1117/12.2297478

SPIE

2018-09-13

9781510616622

Metrology, Inspection, and Process Control for Microlithography XXXII, 10585

Metrology, Inspection, and Process Control for Microlithography XXXII 2018, 2018-02-26 → 2018-03-01, San Jose, United States

Green Open Access added to TU Delft Institutional Repository ‘You share, we take care!’ – Taverne project https://www.openaccess.nl/en/you-share-we-take-care Otherwise as indicated in the copyright section: the publisher is the copyright holder of this work and the author uses the Dutch legislation to make this work public.

Institutional Repository

conference paper

© 2018 K.T. Arat, T. Klimpel, C.W. Hagen