Print Email Facebook Twitter Silicon carbide-on-insulator thermal-piezoresistive resonator for harsh environment application Title Silicon carbide-on-insulator thermal-piezoresistive resonator for harsh environment application Author Sun, B. (TU Delft Electronic Components, Technology and Materials; China University of Petroleum (East China)) Mo, J. (TU Delft Electronic Components, Technology and Materials) Zhang, Hemin (Katholieke Universiteit Leuven) van Zeijl, H.W. (TU Delft Electronic Components, Technology and Materials) van Driel, W.D. (TU Delft Electronic Components, Technology and Materials) Zhang, Kouchi (TU Delft Electronic Components, Technology and Materials) Date 2023 Abstract The thermal-piezoresistive effect in silicon (Si) has attracted great attention toward high-performance resonant devices but still faces major challenges for harsh environment applications. Instead of using Si, this paper, for the first time, reports a thermal-piezoresistive resonator based on a silicon carbide-on-insulator (SiCOI) platform. The resonance frequency simulation, CMOS-compatible fabrication, and thermoresistive properties characterization of the proposed SiCOI resonator are presented. The experimental results show linear current-voltage characteristics and a constant temperature coefficient of resistance (TCR) up to 200 °C. Subject Silicon carbide-on-insulatorthermal-piezoresistiveresonatorharsh environment To reference this document use: http://resolver.tudelft.nl/uuid:6dc71712-0a4c-4ba5-b253-55131d774027 DOI https://doi.org/10.1109/MEMS49605.2023.10052401 Publisher IEEE, Danvers Embargo date 2023-09-01 ISBN 978-1-6654-9309-3 Source Proceedings of the 2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS) Event 2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS), 2023-01-15 → 2023-01-19, Munich, Germany Bibliographical note Green Open Access added to TU Delft Institutional Repository 'You share, we take care!' - Taverne project https://www.openaccess.nl/en/you-share-we-take-care Otherwise as indicated in the copyright section: the publisher is the copyright holder of this work and the author uses the Dutch legislation to make this work public. Part of collection Institutional Repository Document type conference paper Rights © 2023 B. Sun, J. Mo, Hemin Zhang, H.W. van Zeijl, W.D. van Driel, Kouchi Zhang Files PDF Silicon_Carbide_on_Insula ... cation.pdf 2.21 MB Close viewer /islandora/object/uuid:6dc71712-0a4c-4ba5-b253-55131d774027/datastream/OBJ/view