A PMUT based photoacoustic system as a microfluidic concentration detector

Roy, Kaustav; Shastri, V.U.; Kumar, Akshay; Rout, Jagi; Isha, Isha; Kalyan, Kritank; Prakash, Jaya; Pratap, Rudra

doi:10.1117/12.2608934

A PMUT based photoacoustic system as a microfluidic concentration detector

Title

A PMUT based photoacoustic system as a microfluidic concentration detector

Author

Roy, Kaustav (Indian Institute of Science)
Shastri, V.U. (TU Delft Micro and Nano Engineering)
Kumar, Akshay (Indian Institute of Science)
Rout, Jagi (Indian Institute of Science)
Isha, Isha (Indian Institute of Science)
Kalyan, Kritank (University of Pennsylvania)
Prakash, Jaya (Indian Institute of Science)
Pratap, Rudra (Indian Institute of Science)

Contributor

Oraevsky, Alexander A. (editor)
Wang, Lihong V. (editor)

Date

2022

Abstract

We report on the development of a novel piezo-MEMS-based optofluidic platform to detect the concentration of various species dissolved in a fluid. This platform employs piezoelectric micromachined ultrasound transducers (PMUTs) to work as a photoacoustic receiver, receiving ultrasound from fluid targets present in microfluidic channels while illuminated with a nanosecond pulsed laser. We fabricate both the PMUTs and the microfluidic channels and subsequently use them for the experiment. We also show the capability of PMUTs as a general photoacoustic receiver and demonstrate its signal-to-noise characteristics (31) and its wide fractional bandwidth (73%).

Subject

concentration detection
microfabrication
microfluidic
photoacoustic
piezo-MEMS
PMUTs

To reference this document use:

http://resolver.tudelft.nl/uuid:769621e7-11de-4819-b736-7436ee57b78f

DOI

https://doi.org/10.1117/12.2608934

Publisher

SPIE

ISBN

9781510647916

Source

Photons Plus Ultrasound: Imaging and Sensing 2022