Print Email Facebook Twitter Polymer constraint effect for electrothermal bimorph microactuators Title Polymer constraint effect for electrothermal bimorph microactuators Author Chu Duc, T. Lau, G.K. Sarro, P.M. Faculty Electrical Engineering, Mathematics and Computer Science Department Microelectronics & Computer Engineering Date 2007-09-04 Abstract The authors report on the analysis of the polymer constraint effect and its use for a micromachined electrothermal bimorph actuator. The actuated displacement is enhanced due to the polymer constraint effect. Both the thermal expansion and apparent Young’s modulus of the constrained polymer blocks are significantly improved, compared with the no constraint case. The calculation that agrees well with experimental results provides the means to optimize the design of the constrained polymer stack electrothermal microactuator. Subject microactuatorspolymersthermal expansionYoung's modulus To reference this document use: http://resolver.tudelft.nl/uuid:a1474a7d-cc27-465b-bbe7-e97f7fcae674 DOI https://doi.org/10.1063/1.2779929 Publisher American Institute of Physics ISSN 0003-6951 Source http://link.aip.org/link/APPLAB/v91/i10/p101902/s1 Source Applied Physics Letters, 91 (10), 2007 Part of collection Institutional Repository Document type journal article Rights (c) 2007 The Author(s); American Institute of Physics Files PDF Chu_Duc_2007.pdf 409.86 KB Close viewer /islandora/object/uuid:a1474a7d-cc27-465b-bbe7-e97f7fcae674/datastream/OBJ/view