Extending the Open-Short de-embedding frequency via metal-l on-wafer calibration approaches

Extending the Open-Short de-embedding frequency via metal-l on-wafer calibration approaches

Esposito, C. (Technische Universität Dresden)
De Martino, C. (TU Delft Electronics; Vertigo Technologies)
Lehmann, S. (GlobalFoundries)
Zhao, Z. (GlobalFoundries)
Mothes, S. (GlobalFoundries)
Kretzschmar, C. (Technische Universität Dresden)
Schroter, M. (Technische Universität Dresden)
Spirito, M. (TU Delft Electronics)

2022

In this contribution, We analyze the bandwidth versus accuracy trade-offs of conventional two-step de-embedding approaches, often employed to extract the device model parameters. The accuracy limitation of incorporating the pad/line section of classical DUT test-fixtures into shunt-series complex and frequency-dependent elements is analyzed by means of linear circuit simulations and EM parametric analysis. The de-embedding accuracy is then evaluated by employing 3D surfaces to include both the frequency and the geometrical dependency. To validate the presented analysis, classical device monitoring parameters are extracted versus frequency for the same nMOS device embedded in two different fixtures. One topology only supports pad level calibration, thus including the fixture pad/line section in the de-embedding process. The second topology allows a direct on-Wafer calibration (reference plane set on metal-1 in close proximity to the DUT) thus minimizing the residual parasitics to be removed by the de-embedding step. Experimental data are then presented and compared to simulation test benches to highlight the improved consistency of the extracted model parameters of the metal-1 calibration approach up to 220GHz.

Calibration
De-embedding
mm-Wave
Open-Short

http://resolver.tudelft.nl/uuid:aee764c1-861a-443e-81e3-818397481186

https://doi.org/10.1109/ARFTG54656.2022.9896529

IEEE

2023-07-01

978-1-6654-6895-4

Proceedings of the 2022 99th ARFTG Microwave Measurement Conference (ARFTG)

2022 99th ARFTG Microwave Measurement Conference (ARFTG), 2022-06-24, Denver, United States

Green Open Access added to TU Delft Institutional Repository 'You share, we take care!' - Taverne project https://www.openaccess.nl/en/you-share-we-take-care Otherwise as indicated in the copyright section: the publisher is the copyright holder of this work and the author uses the Dutch legislation to make this work public.

Institutional Repository

conference paper

© 2022 C. Esposito, C. De Martino, S. Lehmann, Z. Zhao, S. Mothes, C. Kretzschmar, M. Schroter, M. Spirito