Print Email Facebook Twitter Measuring nanoparticles in liquid with attogram resolution using a microfabricated glass suspended microchannel resonator Title Measuring nanoparticles in liquid with attogram resolution using a microfabricated glass suspended microchannel resonator Author Daryani, Mehdi Mollaie (Student TU Delft) Manzaneque Garcia, T. (TU Delft Electronic Instrumentation) Wei, J. (TU Delft Electronic Components, Technology and Materials) Ghatkesar, M.K. (TU Delft Micro and Nano Engineering) Date 2022 Abstract The use of nanoparticles has been growing in various industrial fields, and concerns about their effects on health and the environment have been increasing. Hence, characterization techniques for nanoparticles are essential. Here, we present a silicon dioxide microfabricated suspended microchannel resonator (SMR) to measure the mass and concentration of nanoparticles in a liquid as they flow. We measured the mass detection limits of the device using laser Doppler vibrometry. This limit reached a minimum of 377 ag that correspond to a 34 nm diameter gold nanoparticle or a 243 nm diameter polystyrene particle, when sampled every 30 ms. We compared the fundamental limits of the measured data with an ideal noiseless measurement of the SMR. Finally, we measured the buoyant mass of gold nanoparticles in real-time as they flowed through the SMR. [Figure not available: see fulltext.]. To reference this document use: http://resolver.tudelft.nl/uuid:b852c31b-15a2-4e22-b064-87e51ab4ec34 DOI https://doi.org/10.1038/s41378-022-00425-8 ISSN 2096-1030 Source Microsystems & Nanoengineering, 8 (1) Part of collection Institutional Repository Document type journal article Rights © 2022 Mehdi Mollaie Daryani, T. Manzaneque Garcia, J. Wei, M.K. Ghatkesar Files PDF s41378_022_00425_8.pdf 1.79 MB Close viewer /islandora/object/uuid:b852c31b-15a2-4e22-b064-87e51ab4ec34/datastream/OBJ/view