Damping of 3D-printed polymer microbeam resonators

The emerging high-resolution 3D printing technique called two-photon polymerization (2PP) enables to print devices bottom-up rapidly, contrary to the top-down lithography-based fabrication methods. In this work, various polymer microbeams are 3D printed and their resonant characteristics are analyzed to understand the origin of damping. The...

Resolution Limits of Resonant Sensors

Resonant sensors hold great promise in measuring small masses, to enable future mass spectrometers, and small forces in applications like atomic and magnetic force microscopy. During the last decades, scaling down the size of resonators has led to huge enhancements in sensing resolution, but has also raised the question of what the ultimate...

Discrete Femtolitre Pipetting with 3D Printed Axisymmetrical Phaseguides

The capacity to precisely pipette femtoliter volumes of liquid enables many applications, for example, to functionalize a nanoscale surface and manipulate fluids inside a single-cell. A pressure-controlled pipetting method is the most preferred, since it enables the widest range of working liquids. However, precisely controlling femtoliter...

Measuring nanoparticles in liquid with attogram resolution using a microfabricated glass suspended microchannel resonator

The use of nanoparticles has been growing in various industrial fields, and concerns about their effects on health and the environment have been increasing. Hence, characterization techniques for nanoparticles are essential. Here, we present a silicon dioxide microfabricated suspended microchannel resonator (SMR) to measure the mass and...

Thin-Film Lithium Niobate Acoustic Delay Line Oscillators

In this work, thin-film lithium niobate (LiNbO₃) acoustic delay line (ADL) based oscillators are experimentally investigated for the first time for the application of single-mode oscillators and frequency comb generation. The design space for the ADL-based oscillator is first analyzed, illustrating that the key to low phase noise...

Method to Determine the Closed-Loop Precision of Resonant Sensors from Open-Loop Measurements

Resonant sensors determine a sensed parameter by measuring the resonance frequency of a resonator. For fast continuous sensing, it is desirable to operate resonant sensors in a closed-loop configuration, where a feedback loop ensures that the resonator is always actuated near its resonance frequency, so that the precision is maximized even in...

Low-loss and wideband acoustic delay lines

This paper demonstrates low-loss acoustic delay lines (ADLs) based on shear-horizontal waves in thin-film LiNbO ₃ for the first time. Due to its high electromechanical coupling, the shear-horizontal mode is suited for producing devices with large bandwidths. Here, we show that shear-horizontal waves in LiNbO ₃ thin...