Title
Characterization of low-loss hydrogenated amorphous silicon films for superconducting resonators
Author
Buijtendorp, B.T. (TU Delft Tera-Hertz Sensing)
Bueno, J.
Thoen, David (TU Delft Tera-Hertz Sensing) ![ORCID 0000-0002-5303-7312 ORCID 0000-0002-5303-7312](/sites/all/themes/tud_repo3/img/icons/orcid_16x16.png)
Sberna, V. Murugesan P.M.
Baselmans, J.J.A. (TU Delft Tera-Hertz Sensing) ![ORCID 0000-0002-3385-7305 ORCID 0000-0002-3385-7305](/sites/all/themes/tud_repo3/img/icons/orcid_16x16.png)
Vollebregt, S. (TU Delft Sanitary Engineering)
Endo, A. (TU Delft Tera-Hertz Sensing) ![ORCID 0000-0003-0379-2341 ORCID 0000-0003-0379-2341](/sites/all/themes/tud_repo3/img/icons/orcid_16x16.png)
Contributor
Zmuidzinas, Jonas (editor)
Gao, Jian-Rong (editor)
Date
2020
Abstract
Superconducting resonators used in millimeter-submillimeter astronomy would greatly benefit from deposited dielectrics with a small dielectric loss. We deposited hydrogenated amorphous silicon films using plasma-enhanced chemical vapor deposition, at substrate temperatures of 100°C, 250°C and 350°C. The measured void volume fraction, hydrogen content, microstructure parameter, and bond-angle disorder are negatively correlated with the substrate temperature. All three films have a loss tangent below 10−5 for a resonator energy of 105 photons, at 120 mK and 4–7 GHz. This makes these films promising for microwave kinetic inductance detectors and on-chip millimeter-submilimeter filters.
Subject
Amorphous Silicon
Dielectric Loss
Filter Bank
Kinetic Inductance Detectors
Millimeter-wave
Spectrometer
Submillimeter-wave
Two-level Systems
To reference this document use:
http://resolver.tudelft.nl/uuid:e7225d5a-4241-427c-9657-093aec88c76b
DOI
https://doi.org/10.1117/12.2562233
Publisher
SPIE
Embargo date
2020-11-01
ISBN
9781510636934
Source
Millimeter, Submillimeter, and Far-Infrared Detectors and Instrumentation for Astronomy X, 11453
Event
Millimeter, Submillimeter, and Far-Infrared Detectors and Instrumentation for Astronomy X, 2020-12-14 → 2020-12-18, Virtual/online event due to COVID-19
Series
Proceedings of SPIE - The International Society for Optical Engineering, 0277-786X, 11453
Bibliographical note
Green Open Access added to TU Delft Institutional Repository ‘You share, we take care!’ – Taverne project https://www.openaccess.nl/en/you-share-we-take-care Otherwise as indicated in the copyright section: the publisher is the copyright holder of this work and the author uses the Dutch legislation to make this work public.
Part of collection
Institutional Repository
Document type
conference paper
Rights
© 2020 B.T. Buijtendorp, J. Bueno, David Thoen, V. Murugesan P.M. Sberna, J.J.A. Baselmans, S. Vollebregt, A. Endo