Print Email Facebook Twitter Optical singularity assisted method for accurate parameter detection of step-shaped nanostructure in coherent Fourier scatterometry Title Optical singularity assisted method for accurate parameter detection of step-shaped nanostructure in coherent Fourier scatterometry Author Dou, X. (TU Delft ImPhys/Optics; Shenzhen University) Min, Changjun (Shenzhen University) Zhang, Yuquan (Shenzhen University) Pereira, S.F. (TU Delft ImPhys/Optics) Yuan, Xiaocong (Shenzhen University) Date 2022 Abstract Accurate determination of the physical parameters of nanostructures from optical far-field scattering is an important and challenging topic in the semiconductor industry. Here, we propose a novel metrology method to determine simultaneously the height and side-wall angle of a step-shaped silicon nanostructure. By employing an optical singular beam into a typical coherent Fourier scatterometry system, both parameters can be retrieved through analyzing the intensity profile of the far-field scattering pattern. The use of singular beam is shown to be sensitive to slight changes of the parameters of the step. By changing the relative direction between the singularity and structure, the height and side-wall angle can both be retrieved with high precision. This new method is robust, simple, and can provide valuable means for micro-and-nano- metrologies. To reference this document use: http://resolver.tudelft.nl/uuid:f372ca96-ccb6-4c0b-9721-3b49989df788 DOI https://doi.org/10.1364/OE.462045 ISSN 1094-4087 Source Optics Express, 30 (16), 29287-29294 Part of collection Institutional Repository Document type journal article Rights © 2022 X. Dou, Changjun Min, Yuquan Zhang, S.F. Pereira, Xiaocong Yuan Files PDF oe_30_16_29287.pdf 2.98 MB Close viewer /islandora/object/uuid:f372ca96-ccb6-4c0b-9721-3b49989df788/datastream/OBJ/view