Print Email Facebook Twitter Design, Fabrication, and Characterization of a 4H-SiC CMOS Readout Circuit for Monolithic Integration with SiC Sensors Title Design, Fabrication, and Characterization of a 4H-SiC CMOS Readout Circuit for Monolithic Integration with SiC Sensors Author Sattari, R. (TU Delft Electronic Components, Technology and Materials) van Zeijl, H.W. (TU Delft Electronic Components, Technology and Materials) Zhang, Kouchi (TU Delft Electronic Components, Technology and Materials) Date 2023 Abstract This paper reports the design and fabrication of a 4H-SiC CMOS readout circuit enabling monolithic integration of silicon carbide (SiC) sensors and circuits. Compared to conventional Si electronics, 4H-SiC integrated circuits can sustain operation in harsh conditions such as higher temperatures and radiation levels. The proposed amplifier performance is well balanced through the temperature range of 25 °C to 400 °C. Compared to state-of-the-art, the proposed SiC readout circuit does not include any off-chip components. The amplifier is fully differential, and hence shows improved common-mode rejection and signal-to-noise ratio (SNR). It can be monolithically integrated with SiC sensors in a scalable SiC technology. Subject abilitySiC technologymonolithic integrationreadout circuitoff-chip componentfully differentialcommon-mode rejectionsignal-to-noise ratio (SNR) To reference this document use: http://resolver.tudelft.nl/uuid:136f6979-1a19-463f-bb34-5a87060f3eed DOI https://doi.org/10.23919/EMPC55870.2023.10418435 Publisher IEEE Embargo date 2024-08-09 ISBN 978-1-6654-8736-8 Source Proceedings of the 2023 24th European Microelectronics and Packaging Conference & Exhibition (EMPC) Event 2023 24th European Microelectronics and Packaging Conference & Exhibition (EMPC), 2023-09-11 → 2023-09-14, Cambridge, United Kingdom Series 24th European Microelectronics and Packaging Conference, EMPC 2023 Bibliographical note Green Open Access added to TU Delft Institutional Repository 'You share, we take care!' - Taverne project https://www.openaccess.nl/en/you-share-we-take-care Otherwise as indicated in the copyright section: the publisher is the copyright holder of this work and the author uses the Dutch legislation to make this work public. Part of collection Institutional Repository Document type conference paper Rights © 2023 R. Sattari, H.W. van Zeijl, Kouchi Zhang Files file embargo until 2024-08-09