Print Email Facebook Twitter IR Microspectrometers based on Linear-Variable Optical Filters Title IR Microspectrometers based on Linear-Variable Optical Filters Author Emadi, A. Wu, H. De Graaf, G. Wolffenbuttel, R.F. Faculty Electrical Engineering, Mathematics and Computer Science Department Microelectronics Date 2013-09-04 Abstract This paper presents the design, fabrication and characterization of Infra-Red (IR) Linear Variable Optical Filter (LVOF)-based micro-spectrometers. Two LVOF microspectrometer designs have been realized: one for operating in the 1400 nm to 2500 nm wavelength range and another between 3000 nm and 5000 nm. The IR LVOFs have been fabricated in an IC-Compatible process using resist reflow. The LVOF provides the possibility to have a small size, robust and high-resolution micro-spectrometer in the IR on a detector chip. Such IR microspectrometers can be fabricated at low-cost in high volume production and have huge potential in applications such as liquid identification (e.g. water in alcohol, water in oil) and gas sensing. Subject microspectrometerIRlinear-variable optical filter To reference this document use: http://resolver.tudelft.nl/uuid:14592094-b50d-41c2-9c6e-78e2cb1f624b DOI https://doi.org/10.1016/j.proeng.2011.12.346 Publisher Elsevier ISSN 1877-7058 Source Procedia Engineering, 25, 2011 Part of collection Institutional Repository Document type journal article Rights © 2011 Elsevier Files PDF Emadi_2011.pdf 615.93 KB Close viewer /islandora/object/uuid:14592094-b50d-41c2-9c6e-78e2cb1f624b/datastream/OBJ/view