Electron Beam Induced Nanometer Scale Deposition

Title

Electron Beam Induced Nanometer Scale Deposition

Author

Silvis-Cividjian, N.

Contributor

Kruit, P. (promotor)

Faculty

Applied Sciences

Date

2002-04-22

Subject

electron-beam-induced deposition
gas-assisted nanofabrication
sub-10 nm lithography

To reference this document use:

http://resolver.tudelft.nl/uuid:217f956f-e782-4b99-9d47-8ef1fa9a8bd8

Publisher

Delft University Press

ISBN

90-407-2289-7

Part of collection

Institutional Repository

Document type

doctoral thesis

Rights

(c) 2002 N. Silvis-Cividjian