Print Email Facebook Twitter SOI Digital Accelerometer Based on Pull-in Time Configuration Title SOI Digital Accelerometer Based on Pull-in Time Configuration Author Pakula, L.S. Rajaraman, V. French, P.J. Faculty Electrical Engineering, Mathematics and Computer Science Department Microelectronics & Computer Engineering Date 2009-01-05 Abstract The operation principle, design, fabrication and measurement results of a quasi digital accelerometer fabricated on a thin silicon-on-insulator (SOI) substrate is presented. The accelerometer features quasi-digital output, therefore eliminating the need for analogue signal conditioning. The accelerometer can be directly interfaced to digital electronic circuitry. The measurements showed a pull-in voltage of 2.7 V and a pull-in time from 0 to 1 G to be 3.2 µs. Subject Silicon-on-Insulator (SOI)MEMSDigital AccelerometerTime-Based Accelerometer To reference this document use: http://resolver.tudelft.nl/uuid:357371c7-7cf2-42e3-9f28-fcdadaf8c1de Publisher IEEE Embargo date 2010-09-22 ISBN 9781424446292 Source Proceedings of the 4th IEEE Int. Conference on Nano/Micro Engineered and Molecular Systems (NEMS 2009), Shenzhen, China, January 5-8, 2009 Part of collection Institutional Repository Document type conference paper Rights (c) 2009 L.S. Pakula; V. Rajaraman; French, P.J. Files PDF 05068659.pdf 5.79 MB Close viewer /islandora/object/uuid:357371c7-7cf2-42e3-9f28-fcdadaf8c1de/datastream/OBJ/view