Print Email Facebook Twitter A Buried Vertical Filter for Micro and Nanoparticle Filtration Title A Buried Vertical Filter for Micro and Nanoparticle Filtration Author Li, S.J. Shen, C. Sarro, P.M. Faculty Electrical Engineering, Mathematics and Computer Science Department Microelectronics Date 2011-09-04 Abstract This paper presents a silicon micromachined filter for micro- and nanoparticles. The filter is vertical and completely buried beneath the surface. The buried aspect allows additional features to be integrated above the filter, while the vertical aspect allows the creation of highly uniform pores and efficient use of die area. The filter is composed out of a porous membrane released together with the microchannels by isotropically etching the surrounding silicon. Fluidic experiments have confirmed the filtration functionality of fabricated devices using operating pressures up to 400 kPa. Moreover, by using a reversed fluid flow, cleansing of the cake layer build-up on the porous membrane is attained. Subject silicon micromachiningparticle filterporous membraneverticalburied To reference this document use: http://resolver.tudelft.nl/uuid:4c4d8503-2282-4637-a4d2-1591033c12bb DOI https://doi.org/10.1016/j.proeng.2011.12.294 Publisher Elsevier ISSN 1877-7058 Source Procedia Engineering, 25, 2011 Part of collection Institutional Repository Document type journal article Rights © 2011 Elsevier Files PDF Li_2011.pdf 904.83 KB Close viewer /islandora/object/uuid:4c4d8503-2282-4637-a4d2-1591033c12bb/datastream/OBJ/view