High resolution heterodyne interferometer without detectable periodic nonlinearity

Title

High resolution heterodyne interferometer without detectable periodic nonlinearity

 Author

Joo, K.N.
Ellis, J.D.
Buice, E.S.
Spronck, J.W.
Munnig Schmidt, R.H.

Faculty

Mechanical, Maritime and Materials Engineering

 Department

Precision and Microsystems Engineering

 Date

2010-01-08

 Abstract

A high resolution heterodyne laser interferometer without periodic nonlinearity for linear displacement measurements is described. It uses two spatially separated beams with an offset frequency and an interferometer configuration which has no mixed states to prevent polarization mixing. In this research, a simple interferometer configuration for both retroreflector and plane mirror targets which are both applicable to industrial applications was developed. Experimental results show there is no detectable periodic nonlinearity for both of the retro-reflector interferometer and plane mirror interferometer to the noise level of 20 pm. Additionally, the optical configuration has the benefit of doubling the measurement resolution when compared to its respective traditional counterparts. Because of non-symmetry in the plane mirror interferometer, a differential plane mirror interferometer to reduce the thermal error is also discussed.

 To reference this document use:

http://resolver.tudelft.nl/uuid:75a7d6fa-8564-4f78-b24c-4ed65dd02410

 DOI

https://doi.org/10.1364/OE.18.001159

 Publisher

Optical Society of America

 ISSN

1094-4087

 Source

http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-18-2-1159

 Source

Optics Express, 18 (2), 2010

 Part of collection

Institutional Repository

 Document type

journal article

 Rights

(c) 2010 Optical Society of America
Files
PDF Ellis_2010.pdf 237.46 KB
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