Integrated optical and charged particle inspection apparatus: Corrected version

Title

Integrated optical and charged particle inspection apparatus: Corrected version

 Author

Hoogenboom, J.P.
Kruit, P.
Zonnevylle, A.C.

Faculty

Applied Sciences

 Department

ImPhys/Imaging Physics

 Date

2013-10-10

 Abstract

The invention relates to an apparatus for inspecting a sample, equipped with a charged particle column for producing a focused beam of charged particles to observe or modify the sample, and an optical microscope to observe a region of interest on the sample as is observed by the charged particle beam or vice versa, the apparatus accommodated with a processing unit adapted and equipped for representing an image as generated with said column and an image as generated with said microscope, the unit further adapted for performing an alignment procedure mutually correlating a region of interest in one of said images wherein the alignment procedure involves detecting a change in the optical image as caused therein by the charged particle beam.

 To reference this document use:

http://resolver.tudelft.nl/uuid:827decf1-d445-4eeb-8e31-142bf78139ea

 Publisher

European Patent Office

 Source

http://worldwide.espacenet.com/publicationDetails/biblio?CC=WO&NR=2013151421A8&KC=A8&FT=D&ND=5&date=20131121&DB=EPODOC&locale=en_EP

 Source

WO 2013151421 (A8)

 Part of collection

Institutional Repository

 Document type

patent

 Rights

(c) 2013 The Author(s)
Files
PDF WO2013151421A8-1.pdf 81.11 KB
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