Interferometer, system, and method of use

Title

Interferometer, system, and method of use

 Author

Ellis, J.D.
Spronck, J.W.

Faculty

Mechanical, Maritime and Materials Engineering

 Department

Precision and Microsystems Engineering

 Date

2013-06-06

 Abstract

A compact, balanced, up to three degrees of freedom measuring interferometer which enables fiber delivery of an optical source without periodic nonlinearity, an interferometer system, and method for using an interferometer to measure up to three degrees of freedom is disclosed.

 To reference this document use:

http://resolver.tudelft.nl/uuid:c8a80a9b-5c9e-4eb8-8957-9c7aca84f55f

 Publisher

European Patent Office

 Source

http://worldwide.espacenet.com/publicationDetails/biblio?DB=EPODOC&II=12&ND=3&adjacent=true&locale=en_EP&FT=D&date=20130606&CC=WO&NR=2013082247A1&KC=A1

 Source

WO 2013082247 (A1)

 Part of collection

Institutional Repository

 Document type

patent

 Rights

(c) 2013 The Author(s)
Files
PDF WO2013082247A11.pdf 1.27 MB
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