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Reflectance-based Photonic Crystal Liquid Sensors Made of ALD TiO2
Suspended Submicron Silicon-Beam for High Sensitivity Piezoresistive Sensing
A Buried Vertical Filter for Micro and Nanoparticle Filtration
PECVD silicon carbide surface micromachining technology and selected MEMS applications
Liquid core integrated ring resonator
From 2-Dimensional Lithography To 3-Dimensional Structures
From 2D Lithography to 3D Patterning
MEMS silicon-based micro-evaporator with diamond-shaped fins
Temperature dependence of the resonance frequency of thermogravimetric devices
From 2D Lithography to 3D Patterning
Integrated silicon optofluidic ring resonator
Influence of seed layer on crystallinity and orientation of pulsed — DC sputtered AlN thin-films for piezoelectric actuators
Wafer-level assembly and sealing of a MEMS nanoreactor for in situ microscopy
A silicon MEMS structure for characterization of femto-farad-level capacitive sensors with lock-in architecture
Demonstration of PECVD SiC thermal delay lines for optical coherence tomography in the visible
Waveguide based optofluidics
Pattern transfer on a vertical cavity sidewall using SU8
Atomic layer deposition of TiO2 photonic crystal waveguide biosensors
Photolithography on bulk micromachined substrates
Modulation speed improvement in a Fabry–Perot thermo-optical modulator through a driving signal optimization technique
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