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Announcing TU Delft Repository replacement
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2 July 2024
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Enhancement of AlN Slender Piezoelectric Cantilevers Actuation by PECVD Silicon Nitride Coating
Fabrication of AlN slender piezoelectric cantilevers for highspeed MEMS actuations
Influence of seed layer on crystallinity and orientation of pulsed — DC sputtered AlN thin-films for piezoelectric actuators