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Monolithic integration of a smart temperature sensor on a modular silicon-based organ-on-a-chip device
Cavity‐box soi: Advanced silicon substrate with pre‐patterned box for monolithic mems fabrication
Metal and Polymeric Strain Gauges for Si-based, Monolithically Fabricated Organs-on-Chips
Novel method of alignment to buried cavities in cavity-SOI wafers for advanced MEMS devices
A Platform for Mechano(-Electrical) Characterization of Free-Standing Micron-Sized Structures and Interconnects
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