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Konijnenberg, A.P. (author), Coene, W.M.J.M. (author), Pereira, S.F. (author), Urbach, Paul (author)In this article we combine the well-known Ptychographical Iterative Engine (PIE) with the Hybrid Input-Output (HIO) algorithm. The important insight is that the HIO feedback function should be kept strictly separate from the reconstructed object, which is done by introducing a separate feedback function per probe position. We have also...journal article 2016
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El Gawhary, O. (author), Kumar, N. (author), Pereira, S.F. (author), Coene, W.M.J. (author), Urbach, H.P. (author)Scatterometry is a well established technique currently utilized in research, as well as in industrial applications, to retrieve the properties of a given scatterer (the target) by looking at how the light coming from a certain source is diffracted in the far field. Currently the light source is often a discharge lamp that, after wavelength...journal article 2011