Finite-element model for three-dimensional optical scattering problems

We present a three-dimensional model based on the finite-element method for solving the time harmonic Maxwell equation in optics. It applies to isotropic or anisotropic dielectrics and metals and to many configurations such as an isolated scatterer in a multilayer, bi-gratings, and crystals. We discuss the application of the model to near-field...

Giant Optical Transmission of a Subwavelength Slit Optimized Using the Magnetic Field Phase

On the phase of plasmons excited by slits in a metal film

The excitation of surface plasmons by subwavelength slits in metal films is studied using a rigorous diffraction model. It is shown that the plasmon is launched by a slit in antiphase with the incident magnetic field. This is true independent of slit width and of the metal used. Using this phase information, maxima and minima in transmission are...

Birefringent gratings to be used as polarized colour-separator for liquid crystal displays

Poster presentation Optics Research Group TU Delft in cooperation with Philips and STW

Mark formation modeling in optical rewritable recording

In optical rewritable recording media, such as the Blu-ray Disc, amorphous marks are formed on a crystalline background of a phase-change layer, by means of short, high power laser pulses. In order to improve this data storage concept, it is of great importance to understand the mark formation process. Therefore, a rigorous numerical model is...

Extraordinary transmission through 1, 2 and 3 holes in a perfect conductor, modelled by a mode expansion technique

We discuss a mode expansion technique to rigorously model the diffraction from three-dimensional pits and holes in a perfectly conducting layer with finite thickness. On the basis of our simulations we predict extraordinary transmission through a single hole, caused by the Fabry-Perot effect inside the hole. Furthermore, we study the fundamental...

3D Rigorous simulation of mask induced polarization

The polarization induced by the mask is studied by using a 3D rigorous model, wich solves Maxwell equations using the finite element method. Teh aerial image depends strongly on the change of polarization induced by the materials, thickness of the layer and pitch of the periodic masks.

Finite-element model for phase-change recording

The finite-element method is applied to model phase-change recording in a grooved recording stack. A rigorous model for the scattering of a three-dimensional focused spot by a one-dimensional periodic grating is used to determine the absorbed light in a three-dimensional region inside the phase-change layer. The optical model is combined with a...

Wire-grid diffraction gratings used as polarizing beam splitter for visible light and applied in liquid crystal on silicon

The application of wire grid polarizers as efficient polarizing beam splitters for visible light is studied. The large differences between the transmissivity for different polarizations are explained qualitatively by using the theory of metallic wave guides. The results of rigorous calculations obtained by using the finite element method are...

Gebogen en verstrooid licht

Wavefront measurement for EUV lithography system through Hartmann sensor

Accurate wavefront aberration measurement are essential for next-generation Extreme Ultraviolet (EUV) Lithography. During the past years several accurate interferometric techniques have been developed, but these techniques have limitation. In this work we discuss a different technique based on the Hartmann Wavefront Sensor that requires no...