Optical and structural characterization of Tm₂O₃, TmN, and TmO_xN_y thin films grown by direct-current reactive magnetron sputtering

This paper reports the fabrication and characterization of several thulium oxide and nitride thin films grown by reactive magnetron direct-current sputtering. Hysteresis curves of the Tm emission spectra of the sputtering plasma versus the flow of N₂ or O₂ around the Tm-metal target were monitored. Emission spectra of...