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Bulk micromachined electrostatic RMS-to-DC converter

de Graaf, G. (author), Bartek, M. (author), Xiao, Z. (author), van Mullem, C.J. (author), Wolffenbuttel, R.F. (author)

journal article 2001

document

Opportunities for microtechnology in metrology

Wijngaards, D. (author), Wolffenbuttel, R.F. (author)

journal article 2001

document

IC fabrication-compatible processing for instrumentation and measurement applications

Wijngaards, D.D.L. (author), Wolffenbuttel, R.F. (author)

journal article 2001

document

Microtechnology and microsystems in measurement applications

Wolffenbuttel, R.F. (author), van Mullem, C.J. (author)

journal article 2001

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Guest editorial

Wolffenbuttel, R.F. (author), Van Mullem, C.J. (author)

journal article 2001

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Micromechanical voltage reference using the pull-in of a beam

Cretu, E. (author), Rocha, L.A. (author), Wolffenbuttel, R.F. (author)

journal article 2001

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Light-to-frequency converter using integrating mode photodiodes

de Graaf, G. (author), Wolffenbuttel, R.F. (author)

journal article 1997

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Backside-illuminated silicon photodiode array for an integrated spectrometer

Kwa, T.A. (author), Sarro, P.M. (author), Wolffenbuttel, R.F. (author)

journal article 1997

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The development of a low-stress polysilicon process compatible with standard device processing

French, P.J. (author), van Drieenhuizen, B.P. (author), Poenar, D. (author), Goosen, J.F.L. (author), Mallee, R. (author), Sarro, P.M. (author), Wolffenbuttel, R.F. (author)

journal article 1996

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Noise performance and chopper frequency in integrated micromachined chopper-detectors in silicon

Wolffenbuttel, R.F. (author), de Graaf, G. (author)

journal article 1995

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The accurate measurement of a micromechanical force using force-sensitive capacitances

Wolffenbuttel, M.R. (author), Regtien, P.P.L. (author)

journal article 1995

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Plasma planarization for sensor applications

Li, Y.X. (author), French, P.J. (author), Wolffenbuttel, R.F. (author)

journal article 1995

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Effects of plasma etching chemistry and post-processing on the mechanical adhesion and electrical contact of double polysilicon layer structures

French, P.J. (author), Wolffenbuttel, R.F. (author)

journal article 1995

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Integrated micromachined electrostatic true RMS-to-DC converter

van Drieenhuizen, P. (author), Wolffenbuttel, R.F. (author)

journal article 1995

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Integrated instrumentation amplifier for the phase readout of piezoresistive strain gauges

Wolffenbuttel, R.F. (author), Schekkerman, A.R. (author)

journal article 1994

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Electronically controlled etch-mask for silicon bulk micromachining

Kwa, T.A. (author), Wolffenbuttel, R.F. (author)

journal article 1994

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Tri-colorimetric detector in silicon with one photodiode

Wolffenbuttel, R.F. (author), Blaauw, E.J. (author), Wolffenbuttel, M.R. (author), de Graaf, G. (author)

journal article 1991

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Compliant capacitive wrist sensor for use in industrial robots

Wolffenbuttel, R.F. (author), Mahmoud, K.M. (author), Regtien, P.P.L. (author)

journal article 1990

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Noncontact capacitive torque sensor for use on a rotating axle

Wolffenbuttel, R.F. (author), Foerster, J.A. (author)

journal article 1990