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Huang, Y. (author), Pandraud, G. (author), Sarro, P.M. (author)A promising concept for a photonic crystal sensor for liquid sensing applications is introduced. The two dimensional photonic crystals are fabricated using a recently developed Atomic layer deposition ARrays Defined by Etch-back technique (AARDE) to obtain large functional surfaces and dense pillar arrays. Photonic signals are collected by means...journal article 2011
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Wei, J. (author), Magnani, S. (author), Sarro, P.M. (author)This paper presents a submicron suspended piezoresistive silicon-beam structure as a basic sensing element to replace the conventional piezoresistors, so to improve the detection sensitivity. The alternative element benefits from the increase of the induced stress, which is locally concentrated on the suspended submicron beam. This approach...journal article 2011
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Li, S.J. (author), Shen, C. (author), Sarro, P.M. (author)This paper presents a silicon micromachined filter for micro- and nanoparticles. The filter is vertical and completely buried beneath the surface. The buried aspect allows additional features to be integrated above the filter, while the vertical aspect allows the creation of highly uniform pores and efficient use of die area. The filter is...journal article 2011
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Rajaraman, V. (author), Pakula, L.S. (author), Yang, H. (author), French, P.J. (author), Sarro, P.M. (author)Attractive material properties of plasma enhanced chemical vapour deposited (PECVD) silicon carbide (SiC) when combined with CMOS-compatible low thermal budget processing provides an ideal technology platform for developing various microelectromechanical systems (MEMS) devices and merging them with integrated circuits. In this paper we present a...journal article 2011
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Testa, G. (author), Huang, Y. (author), Zeni, L. (author), Sarro, P. (author), Bernini, R. (author)We report the design and the fabrication of an integrated optofluidic ring resonator based on liquid core antiresonant reflecting optical waveguide (ARROW) operating around ?=635nm with a water filled core (nc=1.33). This waveguide permits a strong coupling between light and analyte as the same microchannel can be used for delivering sample and...conference paper 2011
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Van Zeijl, H.W. (author), Wei, J. (author), Shen, C. (author), Verhaar, T.M. (author), Maury, P. (author), Sarro, P.M. (author)Lithography for IC device fabrication is a high volume high accuracy production technology. Such production characteristics are also attractive for MEMS and 3 dimensional (3D) integration processes. However, advanced lithography has a strong 2 dimensional (2D) nature and is not optimized to fabricate 3D structures. In this work, 5 exposure and...journal article 2010
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Van Zeijl, H.W. (author), Wei, J. (author), Shen, C. (author), Verhaar, T.M. (author), Sarro, P.M. (author)Lithography as developed for IC device fabrication is a high volume high accuracy patterning technology with strong 2 dimensional (2D) characteristics. This 2D nature makes it a challenge to integrate this technology in a 3 dimensional (3D) manufacturing environment. This article addresses the performance of a waferstepper (ASML PAS5000) in...journal article 2010
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Mihailovic, M. (author), Rops, C. (author), Creemer, J.F. (author), Sarro, P.M. (author)A new design of micro-evaporators, with 45 channels (View the MathML source100?m deep) and diamond-shaped fins (View the MathML source40?m wide, View the MathML source160?m long, View the MathML source20?m separation), is fabricated by anodic bonding of silicon and glass wafers, in a five masks process. This new design improves stability of the...journal article 2010
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Iervolino, E. (author), Riccio, M. (author), Van Herwaarden, A.W. (author), Irace, A. (author), Breglio, G. (author), Van der Vlist, W. (author), Sarro, P.M. (author)This paper investigates the temperature dependence of the resonance frequency of thermogravimetric (TG) devices for tip heating over the temperature range of View the MathML source 25–600?C. The resonance frequency of a fabricated TG device shows to be temperature independent for tip heating up to about View the MathML source600?C. This allows a...journal article 2010
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- Van Zeijl, H.W. (author), Sarro, P.M. (author) journal article 2010
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Testa, G. (author), Huang, Y. (author), Sarro, P.M. (author), Zeni, L. (author), Bernini, R. (author)The feasibility of an integrated silicon optofluidic ring resonator is demonstrated. Liquid core antiresonant reflecting optical waveguides are used to realize a rectangular ring resonator with a multimode interference liquid core coupler between the ring and the bus waveguide. In this configuration the same waveguide used to confine the light...journal article 2010
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Tran, A.T. (author), Schellevis, H. (author), Pham, H.T.M. (author), Shen, C. (author), Sarro, P.M. (author)Aluminum Nitride thin films with the desired properties for piezoelectric actuators are grown by pulsed DC sputtering on Si (100) substrates coated with different seed layers (Al/1%Si, Mo, Ti). The influence of sputtering parameters and the seed layers on crystallinity and orientation of the AlN films is investigated. Raman spectroscopy...journal article 2010
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Mele, L. (author), Santagata, F. (author), Panraud, G. (author), Morana, B. (author), Tichelaar, F.D. (author), Creemer, J.F. (author), Sarro, P.M. (author)This paper presents a new process for the fabrication of MEMS-based nanoreactors for in situ atomic-scale imaging of nanoparticles under relevant industrial conditions. The fabrication of the device is completed fully at wafer level in an ISO 5 clean room and it is based on silicon fusion bonding and thin film encapsulation for sealed lateral...journal article 2010
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Wei, J. (author), Chen, Z.L. (author), Liu, Z.W. (author), Sarro, P.M. (author)This paper presents a silicon MEMS capacitive structure to investigate a test methodology for fF-level capacitive sensors’ measurement. The device mimics a capacitive sensor with a changing intermediate layer between the electrodes. A single mask bulk micromachining process is used to fabricate the device, which has a nominal capacitance of 1.2...journal article 2010
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Pandraud, G. (author), Margallo-Balbás, E. (author), Sarro, P.M. (author)Optical Coherence Tomography (OCT) has found applications in many fields of medicine and has a large potential for the optical biopsy of tumors. One of the technological challenges impairing faster adoption of OCT is the relative complexity of the optical instrumentation required, which translates into expensive and bulky setups. In this paper...conference paper 2010
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Testa, G. (author), Huang, Y. (author), Zeni, L. (author), Sarro, P.M. (author), Bernini, R. (author)Integrated liquid core AntiResonant Reflecting Optical Waveguide (ARROW) are used as basic component for the realization of complex optofluidic devices. Liquid core ARROW waveguides permit to confine the light in a low refractive index liquid core, by means of two high refractive index cladding layers designed to form a high reflectivity Fabry...conference paper 2010
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Verhaar, T.M. (author), Wei, J. (author), Sarro, P.M. (author)In this paper, a process to realize metal lines on the sidewall of high aspect ratio cavities is developed. As an alternative to conventional photoresist, SU8 is used to define patterns on vertical sidewalls of deep cavities while maintaining compatibility with conventional IC processes. When transferring a pattern onto a 3D structure,...journal article 2009
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Jardinier, E. (author), Pandraud, G. (author), Pham, M.H. (author), French, P.J. (author), Sarro, P.M. (author)A photonic crystal waveguide biosensor in the visible is presented for biosensing. The sensor is applied to Refractive Index (RI) measurements. The sensitivity at different wavelength is presented for both air holes and air core configurations of photonic crystal waveguide (PCW) made of TiO2. It is shown that by using Atomic Layer Deposition ...journal article 2009
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Venstra, W.J. (author), Spronck, J.W. (author), Sarro, P.M. (author), Van Eijk, J. (author)Photolithography on high topography substrates, such as the sidewalls or the bottom of cavities and trenches created by bulk micromachining, enables the design of complex three-dimensional structures. When a contact lithography system is used to pattern such substrates, local gaps exist between the mask and the substrate. In this paper we...journal article 2009
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- Della Corte, F.G. (author), Merenda, M. (author), Cocorullo, G. (author), Iodice, M. (author), Rendina, I. (author), Sarro, P.M. (author) journal article 2009