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Rajaraman, V. (author), Pakula, L.S. (author), Pham, H.T.M. (author), Sarro, P.M. (author), French, P.J. (author)This paper presents a new low-cost, CMOS-compatible and robust wafer-level encapsulation technique developed using a stress-optimised PECVD SiC as the capping and sealing material, imparting harsh environment capability. This technique has been applied for the fabrication and encapsulation of a wide variety of surface- and thin-SOI...conference paper 2009
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- Duc, T.C. (author), Lau, G.K. (author), Sarro, P.M. (author) journal article 2008
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- Sassen, W.P. (author), Henneken, V.A. (author), Tichem, M. (author), Sarro, P.M. (author) journal article 2008
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Henneken, V.A. (author), Sassen, W.P. (author), Van der Vlist, W. (author), Wien, W.H.A. (author), Tichem, M. (author), Sarro, P.M. (author)In this paper, we present a microelectromechanical systems-based two-degrees-of-freedom positioning device combined with a clamping structure for positioning and constraining an optical fiber. The fiber position can be controlled in the two directions perpendicular to the fiber axis using two specifically designed wedges that can be accurately...journal article 2008
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Sarro, P.M. (author)Micro-electro-mechanical systems (MEMS) or Microsystems technology (MST) is a fascinating and exciting field which significantly contributes to build a bridge between science and society. Physical properties and material characteristics are translated into structures and devices that can have a large positive impact on people’s lives. Silicon...journal article 2008
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- Lau, G.K. (author), Chu, D.T. (author), Goosen, J.F.L. (author), Van Keulen, A. (author), Sarro, P.M. (author) patent 2008
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- Krecinic, F. (author), Chu Duc, T. (author), Lau, G.K. (author), Sarro, P.M. (author) journal article 2008
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Chu Duc, T. (author), Lau, G.K. (author), Sarro, P.M. (author)The authors report on the analysis of the polymer constraint effect and its use for a micromachined electrothermal bimorph actuator. The actuated displacement is enhanced due to the polymer constraint effect. Both the thermal expansion and apparent Young’s modulus of the constrained polymer blocks are significantly improved, compared with the no...journal article 2007
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Yan, B. (author), Pham, H.T.M. (author), Ma, Y. (author), Zhuang, Y. (author), Sarro, P.M. (author)The authors demonstrate a method for the fabrication of in situ ultrathin porous anodic aluminum oxide layers (aspect ratio<2:1) on Si, which can be directly used as templates for nanodot preparation and for pattern transfer. The regular shape of the aluminum oxide pores is maintained even when the thickness of the aluminum oxide template is...journal article 2007
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Lau, G.K. (author), Goosen, J.F.L. (author), Van Keulen, F. (author), Chu Duc, T. (author), Sarro, P.M. (author)A powerful and effective design of a polymeric thermal microactuator is presented. The design has SU-8 epoxy layers filled and bonded in a meandering silicon (Si) microstructure. The silicon microstructure reinforces the SU-8 layers by lateral restraint. It also improves the transverse thermal expansion coefficient and heat transfer for the...journal article 2007
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Kasalynas, I. (author), Adam, A.J.L. (author), Klaassen, T.O. (author), Hovenier, N.J. (author), Panraud, G. (author), Iordanov, V.P. (author), Sarro, P.M. (author)Detection peculiarities of an un-cooled (room temperature) 8×8 pixel array designed to image broadband THz radiation were investigated. Each pixel consists of a thin conductive film absorber on a dielectric membrane with thermopile temperature readout. It was designed and tested for four combinations of two different types of absorber and...conference paper 2007
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Bernini, R. (author), De Nuccio, E. (author), Minardo, A. (author), Zeni, L. (author), Sarro, P.M. (author)In this work we show that integrated silicon hollow core AntiResonant Reflecting Optical Waveguide (ARROW) can be used as a basic tool for the realization of optical sensors. ARROW waveguides, with hollow core, permit to confine the light in a low refractive index liquid core, by means of two cladding layers designed to form a high reflectivity...conference paper 2007
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- Duc, T.C. (author), Wei, J. (author), Sarro, P.M. (author), Lau, G.K. (author) conference paper 2007
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- Paalvast, S.L. (author), Van Zeijl, H.W. (author), Su, J. (author), Sarro, P.M. (author), Van Eijk, J. (author) journal article 2007
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- Lau, G.K. (author), Chu Duc, T. (author), Goosen, J.F.L. (author), Sarro, P.M. (author), Van Keulen, F. (author) journal article 2007
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- Lau, G.K. (author), Goosen, J.F.L. (author), Van Keulen, F. (author), Duc, T.C. (author), Sarro, P.M. (author) conference paper 2007
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- Duc, T.C. (author), Wei, J. (author), Sarro, P.M. (author), Lau, G.K. (author) conference paper 2007
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Creemer, J.F. (author), Zandbergen, H.W. (author), Sarro, P.M. (author)A microreactor for use in a microscope, comprising a first and second cove layer (13) , which cover layers are both at least partly transparent to an electron beam (14) of an electron microscope, and extend next to each other at a mutual distance from each other and between which a chamber (15) is enclosed, wherein an inlet (4) and an outlet (5)...patent 2006
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- Lau, G.K. (author), Goosen, J.F.L. (author), Van Keulen, F. (author), French, P.J. (author), Sarro, P.M. (author) journal article 2006
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- Duc, T.C. (author), Creemer, J.F. (author), Sarro, P.M. (author) journal article 2006