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Dostanic, M. (author), Windt, Laura (author), Wiendels, Maury (author), van Meer, Berend J. (author), Mummery, Christine L. (author), Sarro, Pasqualina M (author), Mastrangeli, Massimo (author)We present a novel design of elastic micropillars for tissue self-assembly in engineered heart tissue (EHT) platforms. The innovative tapered profile confines reproducibly the tissue position along the main micropillar axis, increasing the accuracy of tissue contraction force measurement. Polydimethylsiloxane-based pillars were designed and...conference paper 2023
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Pezone, R. (author), Baglioni, G. (author), Sarro, Pasqualina M (author), Steeneken, P.G. (author), Vollebregt, S. (author)A repeatable method to fabricate multi-layer graphene (ML-gr) membranes of 2r = 85 - 155 μm (t < 10 nm) with a 100% yield on 100 mm wafers is demonstrated. These membranes show higher sensitivity than a commercial MEMS-Mic combined with an area reduction of 10x. The process overcomes one of the main limitations when integrating graphene...conference paper 2023
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Motreuil-Ragot, P.A. (author), Turcan, G. (author), de Wagenaar, B. (author), Hunt, A. (author), Sarro, Pasqualina M (author), Mastrangeli, Massimo (author)Sensing flow rates in structured microenvironments like lab-on-chip (LOC) and organ-on-chip (OoC) is crucial to assess important parameters such as transport of media and molecules of interest. So far, these micro-electromechanical systems for biology (bio-MEMS) mostly rely on flow sensing systems based on thermal sensors. However, thermal...conference paper 2022
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Revyn, N. (author), Hu, Michel H.Y. (author), Frimat, Jean-Philippe (author), de Wagenaar, B. (author), van den Maagdenberg, Arn M.J.M. (author), Sarro, Pasqualina M (author), Mastrangeli, Massimo (author)We present preliminary recordings on chip of three-dimensional (3D) electric neuronal activity from cultures of cortical neurons derived from human-induced pluripotent stem cells (hiPSCs). The recordings were obtained through 3D microelectrode arrays (MEAs) composed of truncated, 90 μm-high Si micropyramids endowed with multiple, electrically...conference paper 2022
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Romijn, J. (author), Vollebregt, S. (author), May, Alexander (author), Erlbacher, Tobias (author), van Zeijl, H.W. (author), Leijtens, J.A.P. (author), Zhang, Kouchi (author), Sarro, Pasqualina M (author)In this paper, we present a quadrant sun position sensor microsystem device in a silicon carbide technology that operates in a field-of-view of ±33° and reaches a mean error of 1.9° in this range. This will allow, for the first time, an inherently visible blind sun position sensor in a CMOS compatible technology. Opto-electronic integration of...conference paper 2022
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Romijn, J. (author), Middelburg, L.M. (author), Vollebregt, S. (author), el Mansouri, B. (author), van Zeijl, H.W. (author), May, Alexander (author), Erlbacher, Tobias (author), Zhang, Kouchi (author), Sarro, Pasqualina M (author)Accurately sensing the temperature in silicon carbide (power) devices is of great importance to their reliable operation. Here, temperature sensors by resistive and CMOS structures are fabricated and characterized in an open silicon carbide CMOS technology. Over a range of 25-200°C, doped design layers have negative temperature coefficients of...conference paper 2021
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Hong, H. (author), Ye, Li (author), Li, Ke (author), Sarro, Pasqualina M (author), Zhang, Kouchi (author), Liu, Zewen (author)In this paper, we report a modified three step anisotropic wet etching (TSWE) method to fabricate solid-state silicon nanoslits. The slit-opening process is performed by <111> crystal plane etching. The etching rate of the <111> crystal plane is reasonably slow as it is only 1/45 of the <100> etching rate, thus allowing and...conference paper 2021
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Aydogmus, H. (author), van Ginkel, H.J. (author), Galiti, Anna-Danai (author), Hu, Michel (author), Frimat, Jean-Philippe (author), van den Maagdenberg, Arn (author), Zhang, Kouchi (author), Mastrangeli, Massimo (author), Sarro, Pasqualina M (author)Continuous monitoring of tissue microphysiology is a key enabling feature of the organ-on-chip (OoC) approach for drug screening and disease modeling. Sensing charged species in OoC tissue microenvironments is thereby essential. However, the inherently small (i.e., cm) size of OoC devices poses the challenging requirement to integrate...conference paper 2021
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Mastrangeli, Massimo (author), Aydogmus, H. (author), Dostanic, M. (author), Motreuil-Ragot, P.A. (author), Revyn, N. (author), de Wagenaar, B. (author), Dekker, R. (author), Sarro, Pasqualina M (author)Stemming from the convergence of tissue engineering and microfluidics, organ-on-chip (OoC) technology can reproduce in vivo-like dynamic microphysiological environments for tissues in vitro. The possibility afforded by OoC devices of realistic recapitulation of tissue and organ (patho)physiology may hold the key to bridge the current...conference paper 2021
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Romijn, J. (author), Vollebregt, S. (author), van Zeijl, H.W. (author), Zhang, Kouchi (author), Leijtens, Johan (author), Sarro, Pasqualina M (author)In this paper we present a sun position sensor platform with a scalable approach for the 3D integration of the sensor optics. This would facilitate the sun position sensor miniaturization, reduces fabrication cost and mitigates the need for sensor calibration. The sun position sensor platform is implemented in a seven mask BICMOS technology with...conference paper 2021
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Motreuil-Ragot, P.A. (author), Hunt, A. (author), Kasi, Dhanesh (author), Brajon, B. (author), van den Maagdenberg, Arn M.J.M. (author), Orlova, Valeria (author), Mastrangeli, Massimo (author), Sarro, Pasqualina M (author)Organ-on-chip (OoC) devices are in rising demand for high-throughput and low-cost development and toxico-logical screening of chemicals and pharmaceuticals, as they accurately mimic in vitro physiological conditions as in the human body. In particular, OoCs are urgently needed for screening cardiovascular drug toxicity. Physiological relevance...conference paper 2020
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Aydogmus, H. (author), Dostanic, M. (author), Jahangiri, M. (author), Sinha, Rajarshi (author), Quiros Solano, W.F. (author), Mastrangeli, Massimo (author), Sarro, Pasqualina M (author)We present an extremely compact field effect transistor (FET)-based electrochemical sensor for in situ real-time and label-free measurement of ion concentrations in the cell culture area of organs-on-chip (OoCs) devices. This sensor replaces the functionality of an external reference electrode, crucial in standard electrochemical sensing, by...conference paper 2020
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Alfaro Barrantes, J.A. (author), Mastrangeli, Massimo (author), Thoen, David (author), Bueno Lopez, J. (author), Baselmans, J.J.A. (author), Sarro, Pasqualina M (author)We describe a microfabrication process that, thanks to a specifically tailored sidewall profile, enables for the first-time wafer-scale arrays of high-aspect ratio through-silicon vias (TSVs) coated with DC-sputtered Aluminum, achieving at once superconducting and CMOS-compatible 3D interconnects. Void-free conformal coating of up to 500μm...conference paper 2020
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Ramesha, Raghutham (author), Vollebregt, S. (author), Sarro, Pasqualina M (author)Graphene is an attractive material to be used for pressure sensors due to its thinness, electrical conductivity, and potential high gauge factor. One of the issues with processing graphene is the scalability, which is largely limited by the transfer process that is required for graphene deposited by chemical vapour deposition (CVD). In this...conference paper 2019
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Romijn, J. (author), Vollebregt, S. (author), van Zeijl, H.W. (author), Sarro, Pasqualina M (author)In this paper we present, for the first time, the successful monolithic wafer-scale integration of CVD graphene with CMOS logic for highly miniaturized smart sensing structures with on-chip readout electronics. The use of a patterned CMOS compatible catalyst for pre-defined regions of CVD graphene growth, and the transfer-free process used,...conference paper 2019
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Zhang, B. (author), Wei, J. (author), Bottger, A.J. (author), van Zeijl, H.W. (author), Sarro, Pasqualina M (author), Zhang, Kouchi (author)We report the design, fabrication and experimental investigation of a MEMS micro-hotplate (MHP) for fast time-resolved X-ray diffraction (TRXRD) study of Cu nanoparticle paste (nanoCu paste) sintering process. The device and its system are designed to have a 60 ms minimum time interval, uniform temperature distribution and variant gas...conference paper 2019
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Chowdhury, A. (author), Vezio, P. (author), Bonaldi, M. (author), Borrielli, A. (author), Marino, F. (author), Morana, B. (author), Pandraud, G. (author), Pontin, A. (author), Sarro, Pasqualina M (author)We describe a method to control the cavity detuning in optomechanics experiments. This helps accurate measurements of the asymmetry in the motional sidebands, that testify the quantum behavior of the oscillator and quantifies its occupation number.conference paper 2019
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Quiros Solano, W.F. (author), Gaio, N. (author), Silvestri, C. (author), Arik, Y.B. (author), Stassen, O.M.J.A. (author), van der Meer, A.D. (author), Bouten, C.V.C. (author), van den Berg, A. (author), Dekker, R. (author), Sarro, Pasqualina M (author)We present a novel method to easily and reliably transfer highly porous, large area, thin microfabricated Polydimethylsiloxane (PDMS) porous membranes on Lab-on-Chip (LOC) and Organ-on-Chip (OOC) devices. The use of silicon as carrier substrate and a water-soluble sacrificial layer allows a simple and reproducible transfer of the membranes to...conference paper 2018
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Gaio, N. (author), Waafi, A. (author), Vlaming, M.L.H. (author), Boschman, E. (author), Dijkstra, P. (author), Nacken, O. (author), Braam, S.R. (author), Boucsein, C. (author), Sarro, Pasqualina M (author), Dekker, R. (author)This work presents the first multi-well plate that allows for simultaneous mechanical stimulation and electrical monitoring of multiple in-vitro cell cultures in parallel. Each well of the plate is equipped with an Organ-on-Chip (OOC) device consisting of a stretchable micro-electrode array (MEA). For the first time, a film assisted molding ...conference paper 2018
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Alfaro, J.A. (author), Sberna, P.M. (author), Silvestri, C. (author), Mastrangeli, Massimo (author), Ishihara, R. (author), Sarro, Pasqualina M (author)A novel, simple, low-cost method for the void-free filling of high aspect ratio (HAR) through-silicon-vias (TSVs) is presented. For the first-time pure indium, a type-I superconductor metal, is used to fill HAR vias, 300 to 500 μm in depth and 50 to 100 μm in diameter. The low electrical resistivity achieved without sintering, its...conference paper 2018