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Kelder, E.M. (author), Van Ommen, J.R. (author)A method for covering particles having a diameter of maximally 60 mum by means of atomic layer deposition, whereby said method comprises the step of fluidizing said particles in a fluidized bed reactor using a first reactant gas comprising a first reactant for substantially completely covering said particles with a monolayer of said first reactant.patent 2009