Opto-electronic MEMS oscillator for resonant pressure sensing

This thesis details the design of a self-oscillating MEMS resonator as a pressure sensor. A bi-layer circular diaphragm with a single center perforation is used as a pressure sensitive membrane which measures the absolute pressure of the surrounding medium. A novel aspect of the proposed sensor is that the resonator is made to oscillate by an...

An Energy-Efficient Reconfigurable Interface for Resonant Sensors Based On Ring-Down Measurement

This thesis discusses the theory, architecture design, circuit design and measurements of an ultra-low-energy reconfigurable interface circuit for resonant gas sensors. This interface circuit employs a transient measurement method. The resonant sensor is driven at a frequency close to its resonance frequency by an excitation source that is...