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Analysis of the fabrication process of Nb/Al-AlN/sub x//Nb tunnel junctions with low R/sub n/A values for SIS mixers

Iosad, N.N. (author), Kroug, M. (author), Zijlstra, T. (author), Ermakov, A.B. (author), Jackson, B.D. (author), Zuiddam, M. (author), Meijer, F.E. (author), Klapwijk, T.M. (author)

journal article 2003